Schematic of the 193 nm ArF excimer laser system. Samples were... | Download Scientific Diagram
a) Schematic presentation of the excimer laser system (ESIRIS); (b)... | Download Scientific Diagram
Laser-induced damage threshold by high pulse repetition rate ArF excimer laser radiation
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Excimer laser - Wikipedia
Excimer Laser is optimized for ArF operation.
Micromachines | Free Full-Text | Role of a 193 nm ArF Excimer Laser in Laser-Assisted Plasma-Enhanced Chemical Vapor Deposition of SiNx for Low Temperature Thin Film Encapsulation